Send ASML an e-mail message
Contact ASML with any questions you may have using the correspondence form below.
Service Request Form Instructions
The Service Request Form can be downloaded here. Please review the information provided below before completing the form. Here is what we will ask:
Your Contact Information
This will be your Name, Organization, Mailing Address and e-mail Address. (Note that in the interest of spam reduction we do not send out newsletters, nor will we pass on the information you provide to a third party.)
Sample Size and Description
The examples below are intended to give you an idea of what information would be of most interest to include. It is better if you tell us too much about your sample instead of too little, so feel free to write as much as you think is important.
E.g. A patterned 6” silicon wafer. The surface features are 2 µm in height and have widths varying from 0.5 to 2.0 microns.
E.g. Two 25 mm diameter, 3 mm thick glass optical flats with transparent polymer coatings on one side. The coatings are about 5 µm in thickness.
E.g. Microfabricated surface structure on an aluminum block. The sample is 2 cm in height and 4 cm by 5 cm in width. A photograph is attached to this document so you can see what it looks like. The structures are about 50 µm in height and have steep features with deep holes. Some features are highly reflective, but most of the surface is rough on the micron scale and appears dark to the eye.
Surface Measurements Required
Here you tell us specifically what information you are interested in obtaining. What we will do is assess your needs against the capabilities of our available tools, and then send you a reply with our assessment of what we can and cannot do.
E.g. Take surface images covering a 250 µm square area at the five locations shown in the diagram attached to this application form. I’m most interested in the shape of the entrance and exit points of the nozzles. I want to study this with Gwyddion, so just send me the image files.
E.g. Measure the dielectric film thickness at the center of the disk and at 1 mm from the edge of the disk. The film has an expected thickness of 2-4 µm, and has a refractive index of 1.7.
E.g. Use you stylus profiler to measure the average surface rms roughness and waviness over a 1 mm long profile scan. Set the spatial cutoff filter frequency to 100 µm for the measurements. Do this at six random locations on the surface and send us the profiles along with a table of the roughness/waviness results.
Handling instructions
Important! ASML is not equipped to work with dangerous materials which are toxic, combustible, carcinogens, etc. Do not send us anything that cannot safely be handled with latex gloves in an open lab environment.
E.g. These samples are safe to handle. No special handling is required.
E.g. The coating is a skin/eye irritant. Handle the sample with latex gloves for personal safety.
Additional Questions
We will make a friendly request that a donation is made to to one of the nonprofit organizations ASML supports if we agree to undertake your project. For more information refer to the About ASML page.
We will ask if the information we obtain about your samples needs to be kept confidential. We will also ask if we can post any interesting images we obtain from your samples on the gallery page of our website, and if we can cite your organization’s name on our list of clients.
Shipping Instructions
Will you need your sample returned when we are through? If you do not need it back then we will dispose of it at our end, but note that if it is unsafe to dispose of your sample in a municipal landfill then the sample must be returned.
If the sample is to be sent back then you must provide us with the packaging and postage required to mail it to you via Australia Post.
The best way to do this is either with a ‘box in a box’, or ‘padded envelope in a padded envelope’. Place your sample in the inner box (envelope), unsealed, with the return postage affixed to this container. Be sure to include a shipping label with your shipping address information. Place this return shipping container inside the outer shipping container with our mailing address, and mail it to us.
We will provide you with additional shipping instructions when we respond to your Service Request.