ASML News

New Imaging Technique: FSBF

In conjunction with a Monash University research project, ASML has developed the hardware and software to implement the camera frame stack, best-focus imaging technique (FSBF) as an extension to an existing white light interferometer (WLI) imaging platform. A description of this imaging approach is given in the “Principles of Operation” segment of the ASML website, found under the Library menu.

Yet another inspection microscope…

Optem 65 Zoom optics with brightfield and darkfield illuminators were mounted on a Nikon microscope stage to allow larger field-of-view images to be obtained than were possible on the separate conventional Nikon metrology microscope. With the new tool the FOV can be adjusted from 2.0 mm to 8 mm, which complements the 73 µm to 1400 µm range of the metrology microscope.

Education

Also under the Library menu of this website there is a new Education section. Links to our Fun with Microscopes videos, which are intended for young students, can be found there.

Confocal Microscopy

Unfortunately this project has been mothballed for two years. The parts sit on a workbench in the lab, collecting comments from visitors, and dust, but little else. We need an incentive to finish it. Please suggest an imaging problem where Confocal Microscopy would be the solution to your problem….

A confocal microscope is an essential tool for the type of service we aim to provide, and we are in the process of designing and building one. This instrument will use a 405nm laser, galvanometer beam rastering, and a PMT sensor. It will be controlled by an ARM microprocessor which will interface to a host Windows computer via a USB2 connection.

The microscope base, including the basalt support structure, xy translation and tilt stages, z stage, optical head housing, and multivoltage power supply has been assembled. The main control PCB has been manufactured and partially tested. Most of the firmware has been written and tested. The current activity is focused on mounting the mechano-optical components in the scan head. The next step will be to verify the optical design.

Machine Shop

Z-Axis control was added to the milling machine to facilitate more automation in machining processes, such as engraving text into metal surfaces and the drilling of a large number of holes.

Nano-Indentation

Our AFM can perform simple indentation measurements using silicon cantilevers to indent soft materials such as plastics. For harder materials, and for serious quantitative measurements, we will plan to install a diamond-point Nanoindenter tool. We have the required equipment box up in storage, but because there has been no request thus far for indentation measurements we have given this project low-priority.