ASML Imaging Tools Specifications

Atomic Force Microscope

• Maximum Scanner Range 

  • 80 µm XY, 10 µm Z

• Imaging Modes

  • Standard AFM (open-loop XYZ positioning)

  • Metrology AFM (closed-loop XYZ positioning)

  • Contact Mode

  • Intermittent Contact Mode

  • Phase Shift Mode

  • Lateral Force Mode

  • Magnetic Force Mode

• Sample Manipulation Options

  • Sample imaging at elevated temperatures

  • Sample imaging under aqueous liquids

  • Surface lithography (indentation, scratching, bias voltage modulation)

• Basic Image Measurements

  • Surface Roughness

  • Arc radius of curvature

  • Surface feature periodicity

  • Z Height Histogram Analysis

Scanning Tunneling Microscope

• Maximum Scan Range

  • 500 nm XYZ

• Tunneling Current Range

  • 10 pA – 100 nA

• Tunneling Tips

  • Etched tungsten wire

  • Cut PtIr wire

• Imaging Modes

  • Tip Current at constant tip height

  • Tip Height at constant tunneling current

• Point Spectroscopy

  • I(V) at constant height

  • I(Z) at constant voltage

 Optical Profilometer

• Objective Specifications

  Objective 2.5x 5x 10x 20x 50x

  Field of View(µm) 2000 1000   500   250   100  

  Working Distance(mm) 10.3 9.3 7.4 4.7 3.4

  Resolving Power(µm) 3.7 2.1 0.92 0.69 0.50

  Depth of Focus(µm) 48.6 416.2 3.04 1.71 0.90

• Motorized Sample Stage Range

  • 100 mm x 100 mm

• Maximum Vertical scan range

  • 300 µm single scan

  • 10 mm by vertical stitching

• Camera

  • 0.5MP monochrome

  • 512x512 pixel resolution

• Light Sources

  • White LED

  • Green LED

• Imaging Modes

  • Vertical Scanning Interferometry (VSI)

  • Phase Shift Interferometry (PSI)

  • Vertical Image Stitching

  • Horizontal Image Stitching

  • Single Film Thickness Detection

• Basic Measurements

  • Surface Roughness

  • Arc Radius of Curvature

  • Surface Feature Periodicity

  • Z-Height Histogram Analysis

Stylus Profilometer

• Motorized Sample Stage

  • 200 mm wafer vacuum chuck

• Profile Scan Range

  • 100 µm to 50 mm

• Profiling Speed

  • 10 µm/s to 4 mm/s

• Vertical Sensor Ranges

  • 10 µm, 50 µm, 100 µm, 800 µm

• Tip Force Range

  • 0.05 mg to 10 mg without force control

  • 0.5 mg to 10 mg with force control

• Basic Measurements

  • Radius of Curvature

  • Waviness/Roughness

  • Sequential Step Height Measurement

Optical Microscope

• Motorized Sample Stage Range

  • 100 mm x 100 mm

• Camera

  • 5MP Color

• Minimum Field of View

  • 73 µm @ 512x512 pixel resolution

• Imaging Modes

  • Brightfield

  • Darkfield

  • Vertical Stitching